X-Ray photoelectron spectrometer with automated surface analysis and multi-technique capabilities.


Offer fully automated multi-technique analysis along with high throughput without sacrificing research grade results with the Thermo Scientific™ Nexsa™ X-Ray Photoelectron Spectrometer (XPS) System. Integration of multiple analytical techniques like ISS, UPS, REELS and Raman allows users to conduct true correlative analysis, unlocking the potential for further advances in microelectronics, ultra-thin films, nanotechnology development and many other applications.

Material Analysis and Development
The Nexsa spectrometer delivers flexibility to maximize the potential of your material. Flexibility in the forms of multiple-integrated technique options for true correlative data analysis and high throughput while maintain research quality results.

Optional Upgrades: Add any of the integrated and fully automated techniques to your analysis. Run at the touch of a button.

  • ISS: Ion scattering spectroscopy is a technique in which a beam of ions is scattered by a surface
  • UPS: Ultraviolet photoelectron spectroscopy refers to the measurement of kinetic energy spectra of photoelectrons emitted by molecules which have absorbed ultraviolet photons, in order to determine molecular orbital energies in the valence region
  • Raman: Spectroscopic technique used to in chemistry to provide a structural fingerprint
  • REELS: Reflection electron energy loss spectroscopy

Bring sample features into focus with SnapMap’s optical view. The optical view helps you pint point areas of interest quickly while developing a fully focused XPS image to further define your experiment.
1. X-rays illuminate a small area on the sample.
2. Photo electrons from that small area are collected and focused into the analyzer
3. Spectra are continually acquired as the stage is moving
4. Stage position monitored throughout data acquisition, positions used to generate SnapMap

Application Areas

  • Batteries
  • Biosurfaces
  • Catalysts
  • Ceramics
  • Glass coatings
  • Graphene
  • Metals & oxides
  • Nanomaterials
  • OLEDs
  • Polymers
  • Semiconductors
  • Solar cells
  • Thin films


Powerful Performance from Standard Features:

  • Insulator analysis
  • High performance spectroscopy
  • Depth profiling
  • Multi-technique integration
  • Dual-mode ion source for expanded depth profiling capabilities
  • Tilt Module for ARXPS measurements
  • Avantage Software for instrument control, data processing, and reporting
  • Small spot analysis



Analyzer type
  • 180°, double-focusing, hemispherical analyzer with 128-channel detector
X-ray source type
  • Monochromated, micro-focused, low-power Al K-Alpha X-ray source
X-ray spot size
  • 10–400 µm (adjustable in 5 µm steps)
Depth profiling
  • EX06 monatomic ion source or MAGCIS dual-mode ion source
Maximum Sample area
  • 60 x 60 mm
Maximum sample thickness
  • 20 mm
Vacuum system
  • Two turbo molecular pumps, with automated titanium sublimation pump and backing pump
Optional accessories
  • UPS, ISS, REELS, iXR Raman spectrometer, MAGCIS, sample tilt module, NX sample heating module, sample bias module, vacuum transfer module, adaptor for glove box integration